Inficon MDC-360C Thin Film Deposition Controller Manual do Utilizador

OPERATION and SERVICE MANUALMDC-360CFilm Deposition ControllerIPN 624800 Rev. F

vSAFETY TERMS AND SYMBOLS Terms Used in This Manual WARNING. Warning statements identify conditions or practices that could result in personnel in

MDC-360C DEPOSITION CONTROLLER Tuning the MDC-360C Control Loop 6-2 soon as we’ve learned them, we know what we have to do to correct for errors and

MDC-360C DEPOSITION CONTROLLER Tuning the MDC-360C Control Loop 6-3gone 48 miles because of some traffic earlier on. Our Integral error is 2 miles.

MDC-360C DEPOSITION CONTROLLER Tuning the MDC-360C Control Loop 6-4 manual power mode and adjust the source power using the remote handset to establ

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-17. INPUT/OUTPUT CHARACTERISTICS The following section describes the electrical charact

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-2 internally pulled up to 5 volt through a 4.7 Kohm resistor and incorporate a 10 mill

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-3 Figure 7-1 Passive Input Buffer circuit

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-4 Figure 7-2 Active Input Buffer Circuit

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-5 Figure 7-3 DAC Output circuit

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-6 Figure 7-4 Sensor Input Buffer circuit

MDC-360C DEPOSITION CONTROLLER INPUT/OUTPUT CHARACTERISTICS 7-7 Figure 7-5 Source Output Driver circuit

vi Table of Contents SAFETY PRECAUTION AND PREPARATION FOR USE...IV SAFETY TERMS AND SYMBOLS...

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-18. CONTROLLER INSTALLATION 8.1 MOUNTING The MDC-360C is intended for rack mounting. For m

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-2 8.3.2 LINE VOLTAGE SELECTION AND FUSE REPLACEMENT The voltage selection is preset at the

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-38.3.4 REMOTE POWER HANDSET Figure 8-2 shows the location of the receptacle into which the

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-4 I/O card, PN# 179239, has 12 to 120 volt AC/DC inputs. The Active inputs are set true, a

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-5There is a single screw located on the rear panel secures the top cover of the controller.

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-6Figure 8-2 MDC-360C Front Panel

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-7 Figure 8-3 MDC-360C Rear Panel

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-8 Figure 8-4 DAC socket connector pin out Pin Number Signal 1 Output #1 2 Output #1 Ret

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-9 Figure 8-6 D9S DTE Rear-panel RS-232 socket connector Pin Signal Number RS-232 RS-485

vii2.3.10 PROGRAM KEY... 2-4 2.3.11 ALPHANUMERIC K

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-10 Figure 8-7 D37P Discrete I/O plug connector Pin Number Function 1, 20 Abort output 2

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-11 Figure 8-8 RJ11 Front Panel RS-232 Connector Pin Number Signal 1 Not used 2 CTS

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-12 Figure 8-10 MDC-360C Top View (Cover Removed)

MDC-360C DEPOSITION CONTROLLER CONTROLLER INSTALLATION 8-13 Figure 8-11 Recommended Grounding Method1. As shown, sink two grounding rods into the e

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-19. SYSTEM INSTALLATION 9.1 SENSOR HEAD DESCRIPTION The sensor head is designed for simple ins

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-2 Use a shutter to shield the sensor during initial soak periods to protect the crystal from an

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-3Removal and replacement of sensor crystals should be performed in a clean environment. An iso

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-4Figure 9-1 Removing the Crystal Retainer Figure 9-2 Installing the Sensor Crystal CrystalRetaine

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-59.6 TYPICAL SYSTEM INSTALLATION A typical system installation is shown in Figure 9-7. Instal

viii 4.3.3.8 EDIT UTILITY SETUP... 4-42 5. OPERATING T

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-6Figure 9-3 Sensor Oscillator Schematic

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-7Figure 9-4 Sensor Oscillator Outline

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-8Figure 9-5 IF-111 Instrumentation Feedthrough Outline

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-9Figure 9-6 SH-102 Sensor Head Outline

MDC-360C DEPOSITION CONTROLLER SYSTEM INSTALLATION 9-10 Figure 9-7 Typical System Installation

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-110. THEORY OF OPERATION 10.1 BASIC MEASUREMENT The MDC-360C uses a quartz crystal as the b

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-2Improvements in sensor crystals and oscillator circuits resulted in a significant increase in

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-3Although the above equation still involves a number of simplifying assumptions, its ability t

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-4has an effective time constant of about 2 seconds. Following a step the displayed rate will

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-5measurement with sensor #1 rate = 10.0 and its weight is set to 100.0 and sensor #2 rate = 20

ix7.4 DISCRETE INPUTS ... 7-1 7.5 DIGITAL-TO-ANA

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-6tooling factor equal to 100% and only use the sensor tooling factors to compensate for geomet

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-7Table 10-1 Material Density and Acoustic Impedance Value Material Symbol Density (mg/cm2) Imp

MDC-360C DEPOSITION CONTROLLER THEORY OF OPERATION 10-8Magnesium Oxide MgO 3.58 21.48 Manganese Mn 7.20 23.42 Manganese (II) Sulfide MnS 3.99

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-1 11. COMPUTER INTERFACE 11.1 GENERAL The various computer interfaces of the INFICON MDC-360C De

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-2 rear panel used for RS-232. The pin layout is shown in Figure 8-6 and Table 8-3 lists pin si

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-3 The checksum is the compliment of the one byte sum of all bytes from, and including, the instr

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-4 5 Invalid message. 6 Process undefined. Can’t add layer. 7 Insufficient layer space. Can’t

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-5 36 Send Process Log Directory 37 Send Process Log Data 38 Initiate Remote Action Command 39

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-6 Instructs the controller to send the utility parameters to the host computer. A description

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-7 Parameter Name Length (bytes) Range Seconds 2 (0-59) Minutes 2 (0-59) Hours 2 (1-23) Day of

x 13. APPENDIX A – MATING CABLE COLOR CODES ... 13-1 14. APPENDIX B – PARAMETER TEMPLATES ...

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-8 Sensor#1 Backup Crystal # 1 27 * (1-8) None Sensor#2 Crystal Fail 1 28 * 2 = Not Use

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-9 Material Density 2 48 2 80-9999 0.01 gm/cm3 Acoustic Impedance 2 50 2 400-5999 0.01

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-10 * - Indicates decimal point position is not applicable. Format: Header, Address, Instructio

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-11Number of Layers 2 * (0-998) None Total 23 bytes All of the layer data for process #n

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-12 Chr$(255)+Chr$(254)+Chr$(1)+Chr$(12)+Chr$(1)+Chr$(15)+Chr$(227) 14. Send process layer (Cod

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-13Format: Header, Address, Instruction=16, Length=3, 1 byte Process #(0-98), 2 byte Layer #(0-9

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-14 Example: To instruct the controller to send the source setup parameter list the computer wo

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-15Instructs the controller to enter the incoming sensor setup parameters into memory. A descrip

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-16 Parameter Name Length (bytes) Allowable Range Output # 1 (0-15) Name 16 All ASCII Char

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-17Condition Name Condition Number Sub-condition Range Controller State 128 0-25| Input 129 0

xi Table of Figures FIGURE 2-1 OPERATING DISPLAY... ERROR! BOOKMARK NOT DEFINED. FIGURE 2-2 PARAMETER/STATUS DISPLAY...

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-18 26. Receive Output setup (Code #25) Instructs the controller to enter the incoming Output p

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-1928. Receive Action setup (Code #27) Instructs the controller to enter the incoming Action par

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-20 Bit 7 = System Setup Corrupted Alarm 2 Errors 1 Bit 1 = No Sensor Enabled for Material Bit

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-21Position Source #1-6 Power 2x6 (0-4000), Power=99.9%*N/4000 Sensor #1-6 Crystal Position 1x

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-22 Value Description Length (bytes) Format Units Power 4 String % Average Thickness 5 Strin

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-23Alarm 2 Errors 1 Bit 1 = No Sensor Enabled for Material Bit 2 = Halt Process Action Bit 3 =

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-24 bit 4 = Halt Mode bit 5 = Abort Mode bit 6 = Power Control Mode bit 7 = In Process Contro

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-25Byte # Bit # Description Length(bytes) Format Units 1 0 Power 4 String % 1 Thickness 5

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-26 All string values are in ASCII format including decimal points and colons where needed. See

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-27Completion Status 1 (0=Normal, 1=Aborted, 2=Running, 3=Overrun) Data Points/Minute 1 (38=3

xii FIGURE 9-3 SENSOR OSCILLATOR SCHEMATIC ... 9-6 FIGURE 9-4 SENSOR OSCILLATOR OUTLIN

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-28 Parameter Name Length (bytes) Allowable Range Layer Material Name 10 All ASCII Character

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-29Remote Action Code Description Action Trigger Type 0 Sound Alarm Action Momentary 1 Sound

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-30 # Value Description Len Format Units 0 Power 4 String % 1 Average Thickness 5 String

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-31Bit 1 = Rotator Drive Up Bit 2 = Rotator Drive Down 34 Sensor #1-6 Status 1x6 Bit 0 = Shutt

MDC-360C DEPOSITION CONTROLLER COMPUTER INTERFACE 11-32 Bit 6 = Crystal Marginal&In Process, Switch Bit 7 = Crystal Fail&In Process, Switch

MDC-360C DEPOSITION CONTROLLER REPAIR AND MAINTENANCE 12-112. REPAIR AND MAINTENANCE 12.1 HANDLING PRECAUTIONS Integrated Circuits (I.C.’s) can be

MDC-360C DEPOSITION CONTROLLER REPAIR AND MAINTENANCE 12-2 CAUTION Remove AC line power before disassembling the controller to avoid electrical shoc

MDC-360C DEPOSITION CONTROLLER REPAIR AND MAINTENANCE 12-3power through the Remote Power Handset. b) Controller is in Abort mode. c) Faulty Remote Po

MDC-360C DEPOSITION CONTROLLER APPENDIX A 13-113. APPENDIX A – MATING CABLE COLOR CODES Table 13-1 Source Control Cable Color Code - (4 pin Mini

xiiiList of Tables TABLE 4-1TABLE OF INPUT STATES FOR BCD FEEDBACK TYPE...4-38 TABLE 4-2 TABLE OF INPUT STATES FOR BCD

MDC-360C DEPOSITION CONTROLLER APPENDIX A 13-2 Table 13-2 DAC Cable Color Code - (7 pin Mini DIN) Pin Number Color Signal 1 Black DAC output

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14. APPENDIX B – PARAMETER TEMPLATES The following pages are blank t

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.1 MATERIAL Material Number Material Name Sensor # Crystal # Source

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: MATERIAL CONT’D Maximum Power Max Power Alarm Delay Minimum Power

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.2 PROCESS Page ___ of ___ Process Number Process Name Edit passwor

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.3 DISPLAY SETUP Pause On Layer Complete  Yes  No Display Nega

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.4 INPUTS Input # Input Name True/Logic Card # Pin # Return Pin # 1

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.5 OUTPUTS Output # Output Name Conditions Card # Pin # Return

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.6 ACTIONS Output # Action Name Conditions 1 2 3 4 5 6

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.7 SENSOR SETUP Sensor #  1  2  3 

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-11. GENERAL DESCRIPTION 1.1 PURPOSE The MDC-360C is a full-featured deposition controller which

MDC-360C DEPOSITION CONTROLLER SYSTEM: ENTERED BY: APPROVED BY: DATE: 14.9 DAC SETUP DAC Output #1  Rate  Rate Dev.  Power  Thi

MDC-360C DEPOSITION CONTROLLER 15. INDEX A alpha characters, entering, 4-1 automatic crystal switching. See crystal switching C computer interface, 1

MDC-360C DEPOSITION CONTROLLER proper grounding, 8-1 installation, system, 9-1 instrumentation feedthrough, 9-2 sensor head description, 9-1 sensor

MDC-360C DEPOSITION CONTROLLER position control, 4-8 sign-on screen, 5-1 Simulate mode, 3-1, 3-4, 3-6, 4-4, 4-43 source abort key operation, 2-3, 5-7

MDC-360C DEPOSITION CONTROLLER MENU MAP 16-1 16. MENU MAPS Figure 16-1 Map of Status and Graph Screens

MDC-360C DEPOSITION CONTROLLER MENU MAP 16-2 Figure 16-2 Map of Programming Menu Screens

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-2 minimize the possibility of damage in the event of a failure or other problem in the total de

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-31.3 SPECIFICATIONS 1.3.1 MEASUREMENT Frequency Resolution 0.03 Hz @ 6.0 MHz Mass Resolution

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-4 1.3.6 MATERIAL PARAMETERS Material Name 10 character string Source # 1 to 6 Pocket # 1 to

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-5The MDC-360C also has a built in material library that contains many common material names alo

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-6 1.3.9 SOURCE PARAMETERS Number of Pockets 1 to 16 Shutter Relay Type Normally open, normall

MDC-360C DEPOSITION CONTROLLER GENERAL DESCRIPTION 1-71.4 ACCESSORIES The table below lists the most popular options and accessories. Refer to INFI

MDC-360C DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-12. FRONT PANEL DISPLAYS AND CONTROLS The front panel is divided into two section

MDC-360C DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-2 2.1.6 TIME DISPLAY Time is displayed in hours, minutes and seconds. This displ

MDC-360C DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-3The MDC-360C can also be aborted through the Remote Power Handset. This abort fe

OPERATION and SERVICE MANUALMDC-360CFilm Deposition ControllerIPN 624800 Rev. Fwww.inficon.com [email protected] to our continuing program of

MDC-360C DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-4Figure 2-3 Programming Section 2.3.9 ARROW KEYS The arrow keys are used to naviga

MDC-360C DEPOSITION CONTROLLER FRONT PANEL DISPLAYS AND CONTROLS 2-5 2.3.11 ALPHANUMERIC KEYBOARD The alphanumeric keyboard is used to edit controll

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-13. BENCH CHECKOUT & INSPECTION 3.1 INSPECTION Your MDC-360C was released to th

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-2 3.3.1 MATERIAL #1 PARAMETERS Material Name Cr Source # 1 Pocket # 1 Material

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-33.3.2 MATERIAL #2 PARAMETERS Material Name Au Source # 1 Pocket # 2 Material De

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-4 3.3.3 PROCESS PARAMETERS Process Name Layer No. Thickness Material Sample 1 0

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-5plugged into the third position will provide sensor inputs numbers 5 & 6, and s

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-6 Releasing the Zero line and connecting the Full Scale line to ground will drive b

MDC-360C DEPOSITION CONTROLLER BENCH CHECKOUT & INSPECTION 3-7 Figure 3-1 Remote Power Handset

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.INFICON® is a trademark of INFICON Inc.A

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-14. PROGRAMMING AND CONTROLLER SETUP 4.1 GENERAL 4.1.1 NAVIGATING THE MENU STRUCT

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-2 key. Keep pressing the Alpha key to get the desired letter. Its upper/lower cas

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-34.1.5.1 VIEW/RUN PROCESS PASSWORD The View/Run password is required to view or ru

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-4 4.2.1 UTILITY SETUP The only critical parameter in the Utility Setup is the Crys

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-5Source Voltage - This parameter must be set to correspond to the input voltage ra

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-6 c. Motor Driven Inline Source - Select Inline for the Drive type parameter. Tw

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-7inputs. With pocket one in position, all inputs will be false. With poctket fou

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-8 Crystals parameter defines the number of crystals in the sensor head. The Rotat

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-9b. BCD - With BCD format , the MDC-360C will create from one to three outputs b

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-10The following are a few examples of some typical uses for the MDC-360C’s program

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-114.2.7 MATERIAL SETUP The next step in the initial setup of the controller is to

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-12Soak Power Ramp - Rise to Soak Time, Soak Power and Soak Time Predeposit Power R

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-13The rate ramps are disabled by default with the Ramp Start and Ramp Stop Thickne

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-144.2.10 RESUMING A PROCESS FROM ABORT OR HALT To resume an aborted process, first

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-15process consists of a twelve-character name, two levels of passwords and finally

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-16This parameter defines the desired thickness for the layer. The default for thi

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-174.3.2.1 DEFINE A MATERIAL Selecting a material for viewing and/or editing will

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-18This parameter is the acoustic impedance of the material. The acoustic impedanc

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-19This parameter is the system dead time. Control loop tuning is covered in Secti

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-20For the Rate Establish function to work, the sensor must be located somewhere in

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-2125. Feed Time (0 to 9:59:59) The Feed Time parameter sets the feed time. This

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-2234. Sample Dwell% (000.0 to 100.0) The Sample Dwell% parameter establishes the

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-23⎟⎟⎠⎞⎜⎜⎝⎛⎟⎟⎠⎞⎜⎜⎝⎛ºº csdsdcToolingIIcoscos100%2 where: dc= Distance from source t

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-246. Switch - The sensor is enabled for measurement. The MDC-360C will switch to

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-254.3.3 SYSTEM SETUP Choosing the Edit System Setup option from the Main Menu scre

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-26This parameter defines whether the rightmost 2 or 3 digits of thickness will be

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-274.3.3.2 PROGRAM INPUTS The controller has ‘logical’ discrete inputs which are us

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-28 Figure 4-9 Program Input Screen 4.3.3.3 PROGRAM OUTPUTS The controller has ‘log

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-29Two screens are required to program the Discrete outputs. The first screen prov

INFICON warrants the product to be free of functional defects in material and workmanship and that it will perform in accordance with its published sp

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-304.3.3.3.1 ENTERING A CONDITION STRING A condition string comprises one or more

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-31arrow key to highlight the number on the right column. You then type the number

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-32Ramp To Feed Feed Ramp To Idle Layer Complete Process Complete Process Resume E

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-33Inputs - Input conditions are represented by the user defined programmable input

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-34while it is in the Predeposit Hold state then one second after it enters the dep

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-35 Figure 4-16 Select Defined Action Screen In this screen you can select a pre

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-36switched if more than one sensor/crystal combinations are enabled for measuremen

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-37This parameter defines the shutter relay type used to control the sensor shutter

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-38valve. The MDC-360C will create a "SensorX Drive Up" which is either

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-396. Rotator Delay (0 to 99 seconds) This parameter serves two different function

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-40of deposition, the controller will begin closing the source shutter this much ti

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-41circuit) unless the respective pocket is in position then that input is true (cl

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-42This parameter sets the upper voltage range for the source control output. The

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-43 Figure 4-20 Utility Setup screen 1. Xtal Freq. (2.5, 3.0, 5.0, 6.0, 9.0, 10.

MDC-360C DEPOSITION CONTROLLER PROGRAMMING AND CONTROLLER SETUP 4-447. Data Points/Min (30,60,120,300,600 PPM) This parameter sets the number of ru

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-15. OPERATING THE MDC-360C 5.1 SIGN-ON SCREEN At power-on the Parameter/Status display will p

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-2 Figure 5-2 Run Process Selection Screen From this screen you can change the starting la

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-35.5 GRAPH DISPLAYS There are four different run time graph screens that can be displayed at

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-4 Figure 5-6 Power vs. Time Graph 5.6 STATUS DISPLAYS There are two run time status screen

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-5pocket number and press Enter. The MDC-360C will enter the Change Pocket State where it wil

iv SAFETY PRECAUTION AND PREPARATION FOR USE Input Power Requirements The MDC-360C Deposition Controller can be set to operate one of the following

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-6 During a process, data is logged automatically up to 10 data point sets per minute. At th

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-7been plotted the layer number will be displayed in the upper right hand corner of the screen

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-8 5.8.3 HALT (SOFT ABORT) In Halt all I/O is frozen. If power is above Soak level, it is r

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-9levels. The list is arranged in descending order of priority. In the event that more than

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-105.10.1.1 MIN RATE&MAX POWER This message indicates that the output power is at the ma

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-115.10.1.9 SENSOR FAULT This condition indicates that the correct crystal position feedback h

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-125.10.1.19 XTAL FAIL SWITCH This message indicates the primary crystal has failed and the

MDC-360C DEPOSITION CONTROLLER OPERATING THE MDC-360C 5-13 Figure 5-11 Typical Process Profile

MDC-360C DEPOSITION CONTROLLER Tuning the MDC-360C Control Loop 6-16. TUNING THE MDC-360C CONTROL LOOP 6.1 Control Loop Basics If evaporation rate