Inficon TM-400 Thin Film Deposition Monitor Manual do Utilizador Página 10
- Página / 82
- Índice
- MARCADORES
Avaliado. / 5. Com base em avaliações de clientes
TOC - 2
IPN 178800 Rev. B
TM-350/400 Operating Manual
Chapter 3
Unpacking and Inspection
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Bench Check-Out. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Installing Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3.1 IEEE-488 Option Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3.2 RS-485 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4 Digital To Analog Converter (DAC) Checkout . . . . . . . . . . . . . . . . . . . . . . . 3-3
Chapter 4
Monitor Installation
4.1 Monitor Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Proper Grounding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Heat Dissipation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Rear Panel Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.1 Oscillator Connector(s). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.2 IEEE-488 Option Board (optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.3 Digital To Analog Converter (DAC) Connection. . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.4 Remote TTL Inputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.5 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.6 Line Voltage Selection and Fuse Replacement . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3 Internal DIP Switches. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.1 Crystal Type Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.2 Computer Interface Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.3 DAC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.4 Disable Negative Thickness/Rate Readings . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.5 Allow Crystal Switching to a Failed Sensor (TM-400 Only) . . . . . . . . . . . . . 4-6
4.3.6 Pulse Switch At Thickness Endpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.7 S16 Switch Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.8 DAC Range Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.4 Monitor Cover Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Chapter 5
Sensor, Feedthrough and Oscillator
5.1 Sensor Head Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Sensor Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.3 Instrumentation Feedthrough Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4 Sensor Oscillator Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
- TM-350/400 1
- 10/01/07 5
- Warranty 7
- Table Of Contents 9
- TM-350/400 Operating Manual 10
- TOC - 3 11
- TM-350/400 Operating Manual 11
- TOC - 4 12
- Chapter 11 12
- Repair and Maintenance 12
- Chapter 1 13
- 1.6 Power Switch 14
- 1.5 Line Fuses 14
- Chapter 2 15
- General Description 15
- 2.3.1 Measurement 17
- 2.3.2 Display 17
- 2.3.3 Computer Interfaces 17
- 2.3.4 Program Parameters 18
- 2.3.5 Input Capability 18
- 2.3.6 Output Capability 18
- 2.3.7 Other 18
- Figure 2-1 TM-400 Outline 19
- Figure 2-2 TM-400R Outline 20
- 2.4 Accessories 21
- Chapter 3 23
- Unpacking and Inspection 23
- 3.3.1 IEEE-488 Option Board 24
- 3.3.2 RS-485 Option 25
- Figure 3-4 Output Connector 29
- Figure 3-5 Input Connector 30
- 3 - 10 32
- 3 - 11 33
- 3 - 12 34
- 4.1.1 Proper Grounding 35
- 4.1.2 Heat Dissipation 35
- 4.2.4 Remote TTL Inputs 36
- 4.2.5 Relay Outputs 36
- 4.3 Internal DIP Switches 38
- 4.3.3 DAC 40
- 4.3.7 S16 Switch Settings 41
- 4.3.8 DAC Range Settings 41
- 4.4 Monitor Cover Removal 42
- 4 - 10 44
- Chapter 5 45
- Chapter 6 47
- Sensor Crystal Replacement 47
- Chapter 7 49
- Operation 49
- 7.5 Crystal Test Display 51
- 7.6 Crystal Fail Indication 51
- 7.7 Power Fail Indication 52
- 7.8 DAC Operation 52
- Table 7-2 DAC Range Settings 53
- Chapter 8 55
- Theory of Operation 55
- IPN 178800 Rev. B 56
- 8.4 Rate Calculation 58
- Chapter 9 59
- 9.4 Density 60
- 9.5 Acoustic Impedance 60
- 9.6 Empirical Calibration 61
- 9.6.3 Acoustic Impedance 62
- Chapter 10 67
- Computer Interface 67
- 10.5 Protocol 68
- 10.6 Data Types 69
- 10.8 Instruction Summary 70
- 10 - 5 71
- Decimal Pt 72
- 10 - 7 73
- Table 10-6 Status Data 73
- 10 - 8 74
- 10 - 9 75
- 10 - 10 76
- 11 - 2 78
- 11.3.2 RAM Failure (I FAIL) 79
- 11 - 4 80
- 11 - 5 81
- 11 - 6 82
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